TM equipment
The Nite TM equipment provides a complete logistics transfer solution for substrates and can offer process atmosphere environments such as nitrogen (N2). The chamber structure and airflow have been optimized to ensure stable pressure and temperature within the chamber. Laminar airflow stability guarantees a consistent and clean internal process atmosphere. The sealed chamber can be customized and integrated with robotic arms and production lines to meet the highest demands for usability and maintenance.
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email:sales@whnite.com
- Technical Parameter Equipment technology advantages More Products
Technical Parameter
- ●Substrate Size:Customizable
- ●Robot Accuracy:≤+0.5mm (optional)
- ●Sealed Chamber Leakage Rate:≤0.05vol%/h
- ●Water and Oxygen Content Control:≤1ppm
- ●Temperature Control Accuracy:Room temperature ±1℃ (customizable)
- ●Cleanliness Level:ISO Class 3
- ●Static Electricity:≤±100V
Product Application
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Flow Field Uniformity Analysis Diagram
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Overall Stress Distribution Diagram